UDC
535.211:535.217
DOI
10.18577/2307-6046-2026-0-10-219-234
Article PDF (Russian) (1.12 MB)
How to cite
I. A. Sorokin, I. V. Mekalina A review on broadband pulsed light applications for properties modification of semitransparent thin-film coatings // Proceedings of VIAM. 2026. No. 10 (164). С. 219-234. URL: https://www.viam-works.ru. DOI: 10.18577/2307-6046-2026-0-10-219-234.

A review on broadband pulsed light applications for properties modification of semitransparent thin-film coatings

I. A. Sorokin1, I. V. Mekalina1

1Federal State Unitary Enterprise «All-Russian Scientific-Research Institute of Aviation Materials» of National Research Center «Kurchatov Institute», Moscow, Russia; admin@viam.ru

Abstract

Flash lamp annealing (FLA) is a new method for modifying material properties, using highly powered xenon lamp flashes. While the scientific and technical literature presents numerous studies on modifying properties of opaque structures, less attention has been paid to semitransparent thin-film coatings. This work reviews FLA applications for annealing of transparent conductive oxides, control of phase composition and doping of titanium dioxide and ultraviolet hydrophilization of photocatalysts. The areas of possible future research are also highlighted.

Keywords
flash lamp annealing, xenon flash lamps, broadband light, ultraviolet, thin-film coatings, transparent conductive oxides, photocatalysts

Reference list
  1. Raut H.K., Ganesh V.A., Nair A.S., Ramakrishna S. Anti-reflective coatings: A critical, in-depth review. Energy & Environmental Science, 2011, vol. 4, no. 10, pp. 3779-3804. DOI: 10.1039/c1ee01297e.
  2. Schmitz J. Low temperature thin films for next-generation microelectronics. Surface and coatings technology, 2018, vol. 343, pp. 83-88. DOI: 10.1016/j.surfcoat.2017.11.013.
  3. Tyunkov A.V., Andronov A.A., Zolotukhin D.B. et al. Methods of forming heat-protective coatings of turbine blades (review). Aviation materials and technologies, 2024, no. 4 (77), pp. 140-168. Available at: http://www.journal.viam.ru (accessed: March 03, 2026). DOI: 10.18577/2713-0193-2024-0-4-140-168.
  4. Budinovskiy S.A., Lyapin A.A., Gorlov D.S., Benklyan A.S., Tatarnikov S.V. Multilayer antifretting coating on large-sized manufactures. Aviation materials and technologies, 2022, no. 3 (68), pp. 98-107. Available at: http://www.journal.viam.ru (accessed: March 03, 2026). DOI: 10.18577/2713-0193-2022-0-3-98-107.
  5. Budinovskiy S.A., Gorlov D.S., Benklyan A.S. Deposition of protective ion-plasma coatings on largescale parts on MAP type installations. Aviation materials and technologies, 2024, no. 1 (74), pp. 101-110. Available at: http://www.journal.viam.ru (accessed: March 03, 2026). DOI: 10.18577/2713-0193-2024-0-1-101-110.
  6. Liu H., Wang L., Lin G., Feng Y. Recent progress in the fabrication of flexible materials for wearable sensors. Biomaterials Science, 2022, vol. 10, no. 3, pp. 614-632. DOI: 10.1039/D1BM01136G.
  7. Kamyshny A., Magdassi S. Conductive nanomaterials for printed electronics. Small: Wiley Journal, 2014, vol. 10, no. 17, pp. 3515-3535. DOI: 10.1002/sml.201303000.
  8. Green M.A., Ho-Baillie A., Snaith H.J. The emergence of perovskite solar cells. Nature photonics, 2014, vol. 8, no. 7, pp. 506-514. DOI: 10.1038/nphoton.2014.134.
  9. Henke T., Bartha J.W., Rebohle L. et al. Formation of regularly arranged large grain silicon islands by using embedded micro mirrors in the flash crystallization of amorphous silicon. Journal of Applied Physics, 2014, vol. 115, no. 3. DOI: 10.1063/1.4861398.
  10. Rebohle L., Prucnal S., Reichel D. Flash Lamp Annealing. From Basics to Applications. Cham: Springer Nature Switzerland, 2019, 288 p. DOI: 10.1007/978-3-030-23299-3.
  11. Park S., Yoon Y., Lee S. et al. Thermoinduced and photoinduced sustainable hydrophilic surface of sputtered-TiO2 thin film. Coatings, 2021, vol. 11, no. 11, p. 1360. DOI: 10.3390/coatings1111360.
  12. Sanai Y., Kagami S., Kubota K. Cross-linking photopolymerization of monoacrylate initiated by benzophenone. Journal of Polymer Science Part A: Polymer Chemistry, 2018, vol. 56, no. 14, pp. 1545-1553. DOI: 10.1002/pola.29038.
  13. Li M., Wang Z., Jin Y. et al. Highly efficient visible-blind ultraviolet photodetector based on scalably produced titanium dioxide nanowire arrays. Nano Letters, 2023, vol. 23, no. 13, pp. 6059-6066. DOI: 10.1021/acs.nanolett.3c01383.
  14. Horprathum M., Eiamchai P., Limnonthakul P. et al. Structural, optical and hydrophilic properties of nanocrystalline TiO2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering. Journal of alloys and compounds, 2011, vol. 509, no. 13, pp. 4520-4524. DOI: 10.1016/j.jallcom.2011.01.038.
  15. Heera V., Mucklich A., Posselt M. et al. Heavily Ga-doped germanium layers produced by ion implantation and flash lamp annealing: Structure and electrical activation. Journal of Applied Physics, 2010, vol. 107, no. 5. DOI: 10.1063/1.3309835.
  16. Skorupa W., Yankov R.A., Anwand W. et al. Ultra-shallow junctions produced by plasma doping and flash lamp annealing. Materials Science and Engineering: B, 2004, vol. 114, pp. 358-361. DOI: 10.1016/j.mseb.2004.07.063.
  17. Kim H.S., Dhage S.R., Shim D.E., Hahn H.T. Intense pulsed light sintering of copper nanoink for printed electronics. Applied Physics A, 2009, vol. 97, pp. 791-798. DOI: 10.1007/s00339-009-5360-6.
  18. Lavery B.W., Kumari S., Konermann H. et al. Intense pulsed light sintering of CH3NH3PbI3 solar cells. ACS applied materials & interfaces, 2016, vol. 8, no. 13, pp. 8419-8426. DOI: 10.1021/acsami.5b10166.
  19. Kablov E.N. Innovative developments of FSUE «VIAM» SSC of RF on realization of «Strategic directions of the development of materials and technologies of their processing for the period until 2030». Aviacionnye materialy i tehnologii, 2015, no. 1 (34), pp. 3-33. DOI: 10.18577/2071-9140-2015-0-1-3-33.
  20. Kamrukov A.S., Kulebyakina A.I. Pulsed Xenon Lamps: Technology, Experiment, and Calculation: Study Guide. Moscow: Bauman MSTU Publ., 2011, 85 p.
  21. Skorupa W., Schumann T., Rebohle L. Millisecond thermal processing using flash lamps for the advancement of thin layers and functional coatings. Surface and Coatings Technology, 2017, vol. 314, pp. 169-176. DOI: 10.14332/svc16. proc.0064.
  22. Zhestkij N.A., Povarov S.A., Volodin L. et al. One-step flashlight processing of MOF thin films for non-linear light absorption. Materials Chemistry Frontiers, 2025, vol. 9, no. 9, pp. 1355-1363. DOI: 10.1039/D5QM00166H.
  23. Budinovskiy S.A., Doronin O.N., Kosmin A.A., Benklyan A.S. Influence of the state of the YSZ target on its sputtering rate during deposition of a TBC ceramic layer by the UOKS-3 unit. Aviation materials and technologies, 2021, no. 2 (63), pp. 85-92. Available at: http://www.journal.viam.ru (accessed: August 01, 2025). DOI: 10.18577/2713-0193-2021-0-2-85-92.
  24. Facchetti A., Marks T. Transparent electronics: from synthesis to applications. N.-Y.: John Wiley & Sons, 2010, 452 p. DOI: 10.1002/9780470710609.
  25. Guillen C., Herrero J. Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen. Journal of Applied Physics, 2007, vol. 101, no. 7. DOI: 10.1063/1.2715539.
  26. Kim Y., Park S., Kim S. et al. Xe-arc flash annealing of indium tin oxide thin-films prepared on glass backplanes. International Journal of Heat and Mass Transfer, 2015, vol. 91, pp. 543-551. DOI: 10.1016/j.ijheatmasstransfer.2015.07.132.
  27. Kim Y., Park S., Kim S. et al. Flash lamp annealing of indium tin oxide thin-films deposited on polyimide backplanes. Thin Solid Films, 2017, vol. 628, pp. 88-95. DOI: 10.1016/j.tsf.2017.03.016.
  28. Weller S., Junghahnel M. Flash Lamp Annealing of ITO thin films on ultra-thin glass. Vakuum in Forschung und Praxis, 2015, vol. 27, no. 4. DOI: 10.1002/vipr.201500586.
  29. Neitzke E., Fan Q.H. Study of flashlamp annealing to promote crystallization of indium tin oxide thin films. Journal of Applied Physics, 2023, vol. 134, no. 23. DOI: 10.1063/5.0177627.
  30. Plumley J.B., Cook A.W., Larsen C.A. et al. Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing. Journal of Materials Science, 2018, vol. 53, no. 18, pp. 12949-12960. DOI: 10.1007/s10853-018-2534-7.
  31. David C., Tinkham B.P., Prunic P., Panckow A. Highly conductive and transparent ITO films deposited at low temperatures by pulsed DC magnetron sputtering from ceramic and metallic rotary targets. Surface and Coatings Technology, 2017, vol. 314, pp. 113-117. DOI: 10.1016/j.surfcoat.2016.09.022.
  32. Panckow A.N., David C., Weber J. Flash Lamp Annealing (FLA) of Magnetron Sputtered Low-Temperature TCO Coatings: Post-growth treatment enhances highly conductive and transparent thin films. Vakuum in Forschung und Praxis, 2017, vol. 29, no. 4, pp. 21-25. DOI: 10.1002/vipr.201700652.
  33. Gebel T., Neubert M., Endler R. et al. Millisecond-annealing using flash lamps for improved performance of AZO layers. MRS Online Proceedings Library (OPL), 2011, vol. 1287, art. 1010. DOI: 10.1557/opl.2011.1438.
  34. Lee J., Jo C.H., Lee G. et al. Advancing Al-doped ZnO thin films structural, optical and electrical properties of low temperature PET substrates via flash lamp annealing. Journal of Semiconductors, 2024, vol. 45, no. 12, p. 122101. DOI: 10.1088/1674-4926/24070005.
  35. Prucnal S., Gago R., Calatayud D.G. et al. TiO2 Phase Engineering by Millisecond Range Annealing for Highly Efficient Photocatalysis. The Journal of Physical Chemistry C, 2023, vol. 127, no. 26, pp. 12686–12694. DOI: 10.1021/acs.jpcc.3c01165.
  36. Gago R., Prucnal S., Hübner R. et al. Phase selectivity in Cr and N co-doped TiO2 films by modulated sputter growth and post-deposition flash-lamp-annealing. Coatings, 2019, vol. 9, no. 7, p. 448.
  37. Gago R., Prucnal S., Hubner R. et al. Structural impact of chromium incorporation in as-grown and flash-lamp-annealed sputter deposited titanium oxide films. Journal of Alloys and Compounds, 2017, vol. 729, pp. 438–445. DOI: 10.3390/coatings9070448.
  38. Ye Q., Liu P.Y., Tang Z.F., Zhai L. Hydrophilic properties of nano-TiO2 thin films deposited by RF magnetron sputtering. Vacuum, 2007, vol. 81, no. 5, pp. 627–631. DOI: 10.1016/j.vacuum.2006.09.001.
  39. Hashimoto K., Irie H., Fujishima A. TiO2 photocatalysis: a historical overview and future prospects. Japanese journal of applied physics, 2005, vol. 44, no. 12R, p. 8269. DOI: 10.1143/jjap.44.8269.
  40. Sun R.D., Nakajima A., Fujishima A., Watanabe T., Hashimoto K. Photoinduced surface wettability conversion of ZnO and TiO2 thin films. The Journal of Physical Chemistry B, 2001, vol. 105, no. 10, pp. 1984–1990. DOI: 10.1021/jp002525j.
  41. Numpud P., Charinpanitkul T., Tanthapanichakoon W. Photoinduced hydrophilic property of zinc oxide thin films prepared by sol-gel dip coating method. Journal of the Ceramic Society of Japan, 2008, vol. 116, no. 1351, pp. 414–417. DOI: 10.2109/jcersj2.116.414.
The article was submitted
2026-06-25
approved and accepted for publication after reviewing
2026-07-15